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Chemical-Mechanical Planarization

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Book Details

Contributors
Author Edited By Duane S. Boning Katia Devriendt Michael R. Oliver David J. Stein Ingrid Vos
Dimensions
Width 6.20 inch
Height 0.91 inch
Weight 590 g
Format
Binding Hardcover
Overview
Number of Pages 348 Pages
Series Name MRS Proceedings
Publisher Cambridge University Press
Publication Year 2003
ISBN-13 9781558997042
ISBN-10 1558997040
Language English
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