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High-k Gate Dielectrics and Diffusion Barriers in Cu Metallization

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Book Details

Contributors
Author Prodyut Majumder
Dimensions
Width 5.98 inch
Height 0.35 inch
Weight 249 g
Format
Binding Paperback
Overview
Number of Pages 164 Pages
Publisher LAP Lambert Academic Publishing AG & Co KG
Publication Year 2012
ISBN-13 9783659134364
ISBN-10 3659134368

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