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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures 1st Edition

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Book Details

Contributors
Author "J. Fruhauf, Joachim Fruehauf, Joachim Fr]hauf"
Dimensions
Width 6.30 inch
Height 0.55 inch
Weight 454 g
Format
Binding Hardcover
Overview
Number of Pages 222 Pages
Publisher Springer
Publication Year 2004
ISBN-13 9783540221098
ISBN-10 3540221093
Language English
Edition 1st
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