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Tribological Phenomena in Chemical Mechanical Polishing: Fluid Pressure, Friction and Wear

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Book Details

Contributors
Author Sum Huan Ng
Dimensions
Weight 219 g
Format
Binding Paperback
Overview
Number of Pages 136 Pages
Publisher Vdm Verlag
Publication Year 2009
ISBN-13 9783639182156
ISBN-10 3639182154
Language English
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