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Film Deposition by Plasma Techniques

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Book Details

Contributors
Author Mitsuharu Konuma
Dimensions
Width 6.14 inch
Height 0.47 inch
Weight 340 g
Format
Binding Paperback
Overview
Number of Pages 224 Pages
Series Name "Springer Series on Atomic, Optical, and Plasma Physics"
Publisher Springer
Publication Year 2012
ISBN-13 9783642845130
ISBN-10 3642845134
Language English
Edition Softcover reprint of the original 1st ed. 1992nd
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