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Hafnium Oxide And Hafnium Silicate For High-k Application: Characterization of Hafnium Based Oxide Thin Films Deposited by CVD

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Book Details

Contributors
Author Harish Bhandari
Dimensions
Weight 344 g
Format
Binding Paperback
Overview
Number of Pages 232 Pages
Publisher Lap Lambert Acad. Publ.
Publication Year 2010
ISBN-13 9783838333885
ISBN-10 3838333888
Language English
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